Ellipsometric measurements
We perform complete ellipsometric measurements of samples.
We offer:
- measuring substrates with a maximum diameter of 200 mm
- determination of the thickness of thin layers of transmission or partially transmission materials
- estimation of the composition of multicomponent materials
- thickness measurements of multilayer materials and determination of optical parameters of these layers
- mapping (2D) of the determined parameters (thickness and optical parameters) on the sample surface
- spectral range of measurement from 190 nm to 2100 nm
- range of angle movement of arms from 40° to 90°
- wide base of materials that allows matching the model to the measurement conditions and the measured materials
Keywords: ellipsometer, ellipsometric measurements, ellipsometric analysis, composition estimation, thickness measurement, 2d mapping
contact: uslugi.cezamat@pw.edu.pl