Integrated Photonics Team within the Department of Semiconductor Intelligent Systems at the Center (SEMINSYS) for Advanced Materials and Technologies Cezamat, in collaboration with the Department of Optoelectronics at the Institute of Microelectronics and Optoelectronics of the Faculty of Electronics and Information Technology, performs basic and industrial research as well as developmental work in the area of design, simulation, fabrication and characterization of photonic integrated devices and circuits. The team’s achievements include integrated photonic components operating in visible light: light guides, optical power dividers, and de-/multiplexers, fabricated on a silicon nitride material platform. Team members have experience in the development of indium phosphide and SOI-based photonic components and circuits. Integrated Photonics Team focuses on devices dedicated for biosensing, environmental sensing, and scientific applications.
Available on-site technological facilities make it possible to fabricate oxide and nitride films of assumed thicknesses independently. Available measurement techniques allow determining their material parameters. In this way, information about the fabricated materials is the starting data for the simulation of photonic elements. The use of electron beam lithography in the fabrication process allows the prototyping of photonic components and circuits without the need of producing photolithographic masks. Such technological configuration allows for fast prototyping of new elements and circuits. The technology line allows for fabrication of circuits on 2, 4, and 8-inch substrates.